|
460
|
10.0
|
deviation of helix angle
|
|
µm
|
PMTechValue
|
2
|
Help (de)
Help (en)
Help (tr)
|
|
460
|
8.0
|
deviation of helix angle
|
|
µm
|
PMTechValue
|
43
|
Help (de)
Help (en)
Help (tr)
|
|
460
|
10.1
|
deviation of helix angle
|
|
µm
|
PMTechValue
|
3
|
Help (de)
Help (en)
Help (tr)
|
|
460
|
9.2
|
deviation of helix angle
|
|
µm
|
PMTechValue
|
6
|
Help (de)
Help (en)
Help (tr)
|
|
5923
|
11.0
|
deviation of helix angle based on fab parameters
|
|
°
|
PMTechValue
|
0
|
Help (de)
Help (en)
Help (tr)
|
|
5923
|
9.0
|
deviation of helix angle based on fab parameters
|
|
°
|
PMTechValue
|
0
|
Help (de)
Help (en)
Help (tr)
|
|
5923
|
9.1
|
deviation of helix angle based on fab parameters
|
|
°
|
PMTechValue
|
0
|
Help (de)
Help (en)
Help (tr)
|
|
5923
|
8.0
|
deviation of helix angle based on fab parameters
|
|
°
|
PMTechValue
|
2
|
Help (de)
Help (en)
Help (tr)
|
|
5923
|
6.0
|
deviation of helix angle based on fab parameters
|
|
°
|
PMTechValue
|
0
|
Help (de)
Help (en)
Help (tr)
|
|
5923
|
10.0
|
deviation of helix angle based on fab parameters
|
|
°
|
PMTechValue
|
9
|
Help (de)
Help (en)
Help (tr)
|
|
5923
|
10.1
|
deviation of helix angle based on fab parameters
|
|
°
|
PMTechValue
|
3
|
Help (de)
Help (en)
Help (tr)
|
|
5923
|
8.1
|
deviation of helix angle based on fab parameters
|
|
°
|
PMTechValue
|
10
|
Help (de)
Help (en)
Help (tr)
|
|
5923
|
7.0
|
deviation of helix angle based on fab parameters
|
|
°
|
PMTechValue
|
0
|
Help (de)
Help (en)
Help (tr)
|
|
5923
|
9.2
|
deviation of helix angle based on fab parameters
|
|
°
|
PMTechValue
|
3
|
Help (de)
Help (en)
Help (tr)
|
|
200
|
9.0
|
deviation of offset
|
|
mm
|
PMTechValue
|
12
|
Help (de)
Help (en)
Help (tr)
|
|
200
|
11.0
|
deviation of offset
|
|
mm
|
PMTechValue
|
3
|
Help (de)
Help (en)
Help (tr)
|
|
200
|
9.1
|
deviation of offset
|
|
mm
|
PMTechValue
|
0
|
Help (de)
Help (en)
Help (tr)
|
|
200
|
8.1
|
deviation of offset
|
|
mm
|
PMTechValue
|
28
|
Help (de)
Help (en)
Help (tr)
|
|
200
|
7.0
|
deviation of offset
|
|
mm
|
PMTechValue
|
0
|
Help (de)
Help (en)
Help (tr)
|
|
200
|
6.0
|
deviation of offset
|
|
mm
|
PMTechValue
|
0
|
Help (de)
Help (en)
Help (tr)
|