Amount of tip relief
| Symbol | Cαa |
|---|---|
| Unit | µm |
| Attribute-ID | tip relief amount |
| Numeric ID | 22 |
| Value Type | PMTechValue |
The amount of tip relief Cαa is the value by which the modification should be made.
| Cαa | Amount of tip relief |
| lCa, dCa | Length or beginning of tip relief |
| lCa1, dCa1 | Start of transition radius |
| lCa2, dCa2 | End of transition radius |